5/21/2011	1:53:41 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/21/2011	1:53:42 PM	Recipe started at 1:53 PM
5/21/2011	1:53:42 PM	H2 valve closed
5/21/2011	1:53:42 PM	BCl3 valve closed
5/21/2011	1:53:42 PM	PH3 valve closed
5/21/2011	1:53:42 PM	SiCl4 pre valve closed
5/21/2011	1:53:42 PM	SiCl4 post valve closed
5/21/2011	1:53:42 PM	Main Vac valve closed
5/21/2011	1:53:42 PM	Bypass valve closed
5/21/2011	1:53:42 PM	Bubbler valve closed
5/21/2011	1:53:42 PM	Helium valve opened
5/21/2011	1:53:42 PM	Helium MFC set to  500.000000
5/21/2011	1:53:42 PM	H2 MFC set to  0.000000
5/21/2011	1:53:42 PM	BCl3 MFC set to  0.000000
5/21/2011	1:53:42 PM	PHl3 MFC set to  0.000000
5/21/2011	1:53:42 PM	SiCl4 MFC set to  0.000000
5/21/2011	1:53:42 PM	Bypass solenoid MFC set to  0.000000
5/21/2011	1:53:42 PM	Tube furnace set to 0
5/21/2011	2:05:24 PM	Helium valve closed
5/21/2011	2:05:24 PM	H2 valve closed
5/21/2011	2:05:24 PM	BCl3 valve closed
5/21/2011	2:05:24 PM	PH3 valve closed
5/21/2011	2:05:24 PM	SiCl4 pre valve closed
5/21/2011	2:05:24 PM	SiCl4 post valve closed
5/21/2011	2:05:24 PM	Main Vac valve closed
5/21/2011	2:05:24 PM	Bypass valve closed
5/21/2011	2:05:24 PM	Bubbler valve closed
5/21/2011	2:05:24 PM	Helium MFC set to  0.000000
5/21/2011	2:05:24 PM	H2 MFC set to  0.000000
5/21/2011	2:05:24 PM	BCl3 MFC set to  0.000000
5/21/2011	2:05:24 PM	PHl3 MFC set to  0.000000
5/21/2011	2:05:24 PM	SiCl4 MFC set to  0.000000
5/21/2011	2:05:24 PM	Bypass solenoid MFC set to  0.000000
5/21/2011	2:05:25 PM	Tube furnace set to 0
5/21/2011	2:05:25 PM	Run finished at 2:05 PM
5/21/2011	2:05:25 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/21/2011	2:06:31 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/21/2011	2:06:32 PM	Recipe started at 2:06 PM
5/21/2011	2:06:32 PM	Helium valve closed
5/21/2011	2:06:32 PM	H2 valve closed
5/21/2011	2:06:32 PM	BCl3 valve closed
5/21/2011	2:06:32 PM	PH3 valve closed
5/21/2011	2:06:32 PM	SiCl4 pre valve closed
5/21/2011	2:06:32 PM	SiCl4 post valve closed
5/21/2011	2:06:32 PM	Main Vac valve closed
5/21/2011	2:06:32 PM	Bubbler valve closed
5/21/2011	2:06:32 PM	Bypass valve opened
5/21/2011	2:06:32 PM	Helium MFC set to  0.000000
5/21/2011	2:06:32 PM	H2 MFC set to  0.000000
5/21/2011	2:06:32 PM	BCl3 MFC set to  0.000000
5/21/2011	2:06:32 PM	PHl3 MFC set to  0.000000
5/21/2011	2:06:32 PM	SiCl4 MFC set to  0.000000
5/21/2011	2:06:32 PM	Bypass solenoid MFC set to  0.000000
5/21/2011	2:06:32 PM	Tube furnace set to 0
5/21/2011	2:07:03 PM	Helium valve closed
5/21/2011	2:07:03 PM	H2 valve closed
5/21/2011	2:07:03 PM	BCl3 valve closed
5/21/2011	2:07:03 PM	PH3 valve closed
5/21/2011	2:07:03 PM	SiCl4 pre valve closed
5/21/2011	2:07:03 PM	SiCl4 post valve closed
5/21/2011	2:07:03 PM	Bubbler valve closed
5/21/2011	2:07:03 PM	Main Vac valve opened
5/21/2011	2:07:03 PM	Bypass valve opened
5/21/2011	2:07:03 PM	Helium MFC set to  0.000000
5/21/2011	2:07:03 PM	H2 MFC set to  0.000000
5/21/2011	2:07:03 PM	BCl3 MFC set to  0.000000
5/21/2011	2:07:03 PM	PHl3 MFC set to  0.000000
5/21/2011	2:07:03 PM	SiCl4 MFC set to  0.000000
5/21/2011	2:07:03 PM	Bypass solenoid MFC set to  0.000000
5/21/2011	2:07:03 PM	Tube furnace set to 0
5/21/2011	2:07:04 PM	Run finished at 2:07 PM
5/21/2011	2:07:04 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/21/2011	3:20:41 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
5/21/2011	3:20:53 PM	Recipe started at 3:20 PM
5/21/2011	3:20:53 PM	Helium valve closed
5/21/2011	3:20:53 PM	H2 valve closed
5/21/2011	3:20:53 PM	BCl3 valve closed
5/21/2011	3:20:53 PM	PH3 valve closed
5/21/2011	3:20:53 PM	SiCl4 pre valve closed
5/21/2011	3:20:53 PM	SiCl4 post valve closed
5/21/2011	3:20:53 PM	Main Vac valve closed
5/21/2011	3:20:53 PM	Bubbler valve closed
5/21/2011	3:20:53 PM	Bypass valve opened
5/21/2011	3:20:53 PM	Helium MFC set to  0.000000
5/21/2011	3:20:53 PM	H2 MFC set to  0.000000
5/21/2011	3:20:53 PM	BCl3 MFC set to  0.000000
5/21/2011	3:20:53 PM	PHl3 MFC set to  0.000000
5/21/2011	3:20:53 PM	SiCl4 MFC set to  0.000000
5/21/2011	3:20:53 PM	Bypass solenoid MFC set to  0.000000
5/21/2011	3:20:53 PM	Tube furnace set to 0
5/21/2011	3:20:53 PM	Helium valve closed
5/21/2011	3:20:53 PM	H2 valve closed
5/21/2011	3:20:53 PM	BCl3 valve closed
5/21/2011	3:20:53 PM	PH3 valve closed
5/21/2011	3:20:53 PM	SiCl4 pre valve closed
5/21/2011	3:20:53 PM	SiCl4 post valve closed
5/21/2011	3:20:53 PM	Bubbler valve closed
5/21/2011	3:20:53 PM	Main Vac valve opened
5/21/2011	3:20:53 PM	Bypass valve opened
5/21/2011	3:20:53 PM	Helium MFC set to  0.000000
5/21/2011	3:20:53 PM	H2 MFC set to  0.000000
5/21/2011	3:20:53 PM	BCl3 MFC set to  0.000000
5/21/2011	3:20:53 PM	PHl3 MFC set to  0.000000
5/21/2011	3:20:53 PM	SiCl4 MFC set to  0.000000
5/21/2011	3:20:53 PM	Bypass solenoid MFC set to  0.000000
5/21/2011	3:20:53 PM	Tube furnace set to 0
5/21/2011	3:21:53 PM	H2 valve closed
5/21/2011	3:21:53 PM	BCl3 valve closed
5/21/2011	3:21:53 PM	PH3 valve closed
5/21/2011	3:21:53 PM	SiCl4 pre valve closed
5/21/2011	3:21:53 PM	SiCl4 post valve closed
5/21/2011	3:21:53 PM	Bubbler valve closed
5/21/2011	3:21:53 PM	Helium valve opened
5/21/2011	3:21:53 PM	Main Vac valve opened
5/21/2011	3:21:53 PM	Bypass valve opened
5/21/2011	3:21:53 PM	Helium MFC set to  100.000000
5/21/2011	3:21:53 PM	H2 MFC set to  0.000000
5/21/2011	3:21:53 PM	BCl3 MFC set to  0.000000
5/21/2011	3:21:53 PM	PHl3 MFC set to  0.000000
5/21/2011	3:21:53 PM	SiCl4 MFC set to  0.000000
5/21/2011	3:21:53 PM	Bypass solenoid MFC set to  0.000000
5/21/2011	3:21:53 PM	Tube furnace set to 0
5/21/2011	3:22:53 PM	Helium valve closed
5/21/2011	3:22:53 PM	H2 valve closed
5/21/2011	3:22:53 PM	BCl3 valve closed
5/21/2011	3:22:53 PM	PH3 valve closed
5/21/2011	3:22:53 PM	SiCl4 pre valve closed
5/21/2011	3:22:53 PM	SiCl4 post valve closed
5/21/2011	3:22:53 PM	Bubbler valve closed
5/21/2011	3:22:53 PM	Main Vac valve opened
5/21/2011	3:22:54 PM	Bypass valve opened
5/21/2011	3:22:54 PM	Helium MFC set to  0.000000
5/21/2011	3:22:54 PM	H2 MFC set to  0.000000
5/21/2011	3:22:54 PM	BCl3 MFC set to  0.000000
5/21/2011	3:22:54 PM	PHl3 MFC set to  0.000000
5/21/2011	3:22:54 PM	SiCl4 MFC set to  0.000000
5/21/2011	3:22:54 PM	Bypass solenoid MFC set to  0.000000
5/21/2011	3:22:54 PM	Tube furnace set to 0
5/21/2011	3:23:54 PM	H2 valve closed
5/21/2011	3:23:54 PM	BCl3 valve closed
5/21/2011	3:23:54 PM	PH3 valve closed
5/21/2011	3:23:54 PM	SiCl4 pre valve closed
5/21/2011	3:23:54 PM	SiCl4 post valve closed
5/21/2011	3:23:54 PM	Bubbler valve closed
5/21/2011	3:23:54 PM	Helium valve opened
5/21/2011	3:23:54 PM	Main Vac valve opened
5/21/2011	3:23:54 PM	Bypass valve opened
5/21/2011	3:23:54 PM	Helium MFC set to  100.000000
5/21/2011	3:23:54 PM	H2 MFC set to  0.000000
5/21/2011	3:23:54 PM	BCl3 MFC set to  0.000000
5/21/2011	3:23:54 PM	PHl3 MFC set to  0.000000
5/21/2011	3:23:54 PM	SiCl4 MFC set to  0.000000
5/21/2011	3:23:54 PM	Bypass solenoid MFC set to  0.000000
5/21/2011	3:23:54 PM	Tube furnace set to 0
5/21/2011	3:24:54 PM	Helium valve closed
5/21/2011	3:24:54 PM	H2 valve closed
5/21/2011	3:24:54 PM	BCl3 valve closed
5/21/2011	3:24:54 PM	PH3 valve closed
5/21/2011	3:24:54 PM	SiCl4 pre valve closed
5/21/2011	3:24:54 PM	SiCl4 post valve closed
5/21/2011	3:24:54 PM	Bubbler valve closed
5/21/2011	3:24:54 PM	Main Vac valve opened
5/21/2011	3:24:54 PM	Bypass valve opened
5/21/2011	3:24:54 PM	Helium MFC set to  0.000000
5/21/2011	3:24:54 PM	H2 MFC set to  0.000000
5/21/2011	3:24:54 PM	BCl3 MFC set to  0.000000
5/21/2011	3:24:54 PM	PHl3 MFC set to  0.000000
5/21/2011	3:24:54 PM	SiCl4 MFC set to  0.000000
5/21/2011	3:24:54 PM	Bypass solenoid MFC set to  0.000000
5/21/2011	3:24:54 PM	Tube furnace set to 0
5/21/2011	3:25:54 PM	H2 valve closed
5/21/2011	3:25:54 PM	BCl3 valve closed
5/21/2011	3:25:54 PM	PH3 valve closed
5/21/2011	3:25:54 PM	SiCl4 pre valve closed
5/21/2011	3:25:54 PM	SiCl4 post valve closed
5/21/2011	3:25:54 PM	Bubbler valve closed
5/21/2011	3:25:54 PM	Helium valve opened
5/21/2011	3:25:54 PM	Main Vac valve opened
5/21/2011	3:25:54 PM	Bypass valve opened
5/21/2011	3:25:54 PM	Helium MFC set to  100.000000
5/21/2011	3:25:54 PM	H2 MFC set to  0.000000
5/21/2011	3:25:54 PM	BCl3 MFC set to  0.000000
5/21/2011	3:25:54 PM	PHl3 MFC set to  0.000000
5/21/2011	3:25:54 PM	SiCl4 MFC set to  0.000000
5/21/2011	3:25:54 PM	Bypass solenoid MFC set to  0.000000
5/21/2011	3:25:54 PM	Tube furnace set to 0
5/21/2011	3:26:54 PM	Helium valve closed
5/21/2011	3:26:54 PM	H2 valve closed
5/21/2011	3:26:54 PM	BCl3 valve closed
5/21/2011	3:26:54 PM	PH3 valve closed
5/21/2011	3:26:54 PM	SiCl4 pre valve closed
5/21/2011	3:26:54 PM	SiCl4 post valve closed
5/21/2011	3:26:54 PM	Bubbler valve closed
5/21/2011	3:26:54 PM	Main Vac valve opened
5/21/2011	3:26:54 PM	Bypass valve opened
5/21/2011	3:26:54 PM	Helium MFC set to  0.000000
5/21/2011	3:26:54 PM	H2 MFC set to  0.000000
5/21/2011	3:26:54 PM	BCl3 MFC set to  0.000000
5/21/2011	3:26:54 PM	PHl3 MFC set to  0.000000
5/21/2011	3:26:54 PM	SiCl4 MFC set to  0.000000
5/21/2011	3:26:54 PM	Bypass solenoid MFC set to  0.000000
5/21/2011	3:26:54 PM	Tube furnace set to 0
5/21/2011	3:27:54 PM	H2 valve closed
5/21/2011	3:27:54 PM	BCl3 valve closed
5/21/2011	3:27:54 PM	PH3 valve closed
5/21/2011	3:27:55 PM	SiCl4 pre valve closed
5/21/2011	3:27:55 PM	SiCl4 post valve closed
5/21/2011	3:27:55 PM	Bubbler valve closed
5/21/2011	3:27:55 PM	Helium valve opened
5/21/2011	3:27:55 PM	Main Vac valve opened
5/21/2011	3:27:55 PM	Bypass valve opened
5/21/2011	3:27:55 PM	Helium MFC set to  100.000000
5/21/2011	3:27:55 PM	H2 MFC set to  0.000000
5/21/2011	3:27:55 PM	BCl3 MFC set to  0.000000
5/21/2011	3:27:55 PM	PHl3 MFC set to  0.000000
5/21/2011	3:27:55 PM	SiCl4 MFC set to  0.000000
5/21/2011	3:27:55 PM	Bypass solenoid MFC set to  0.000000
5/21/2011	3:27:55 PM	Tube furnace set to 0
5/21/2011	3:28:55 PM	Helium valve closed
5/21/2011	3:28:55 PM	H2 valve closed
5/21/2011	3:28:55 PM	BCl3 valve closed
5/21/2011	3:28:55 PM	PH3 valve closed
5/21/2011	3:28:55 PM	SiCl4 pre valve closed
5/21/2011	3:28:55 PM	SiCl4 post valve closed
5/21/2011	3:28:55 PM	Bubbler valve closed
5/21/2011	3:28:55 PM	Main Vac valve opened
5/21/2011	3:28:55 PM	Bypass valve opened
5/21/2011	3:28:55 PM	Helium MFC set to  0.000000
5/21/2011	3:28:55 PM	H2 MFC set to  0.000000
5/21/2011	3:28:55 PM	BCl3 MFC set to  0.000000
5/21/2011	3:28:55 PM	PHl3 MFC set to  0.000000
5/21/2011	3:28:55 PM	SiCl4 MFC set to  0.000000
5/21/2011	3:28:55 PM	Bypass solenoid MFC set to  0.000000
5/21/2011	3:28:55 PM	Tube furnace set to 0
5/21/2011	3:29:55 PM	H2 valve closed
5/21/2011	3:29:55 PM	BCl3 valve closed
5/21/2011	3:29:55 PM	PH3 valve closed
5/21/2011	3:29:55 PM	SiCl4 pre valve closed
5/21/2011	3:29:55 PM	SiCl4 post valve closed
5/21/2011	3:29:55 PM	Bubbler valve closed
5/21/2011	3:29:55 PM	Helium valve opened
5/21/2011	3:29:55 PM	Main Vac valve opened
5/21/2011	3:29:55 PM	Bypass valve opened
5/21/2011	3:29:55 PM	Helium MFC set to  100.000000
5/21/2011	3:29:55 PM	H2 MFC set to  0.000000
5/21/2011	3:29:55 PM	BCl3 MFC set to  0.000000
5/21/2011	3:29:55 PM	PHl3 MFC set to  0.000000
5/21/2011	3:29:55 PM	SiCl4 MFC set to  0.000000
5/21/2011	3:29:55 PM	Bypass solenoid MFC set to  0.000000
5/21/2011	3:29:55 PM	Tube furnace set to 0
5/21/2011	3:30:55 PM	Helium valve closed
5/21/2011	3:30:55 PM	H2 valve closed
5/21/2011	3:30:55 PM	BCl3 valve closed
5/21/2011	3:30:55 PM	PH3 valve closed
5/21/2011	3:30:55 PM	SiCl4 pre valve closed
5/21/2011	3:30:55 PM	SiCl4 post valve closed
5/21/2011	3:30:55 PM	Bubbler valve closed
5/21/2011	3:30:55 PM	Main Vac valve opened
5/21/2011	3:30:55 PM	Bypass valve opened
5/21/2011	3:30:55 PM	Helium MFC set to  0.000000
5/21/2011	3:30:55 PM	H2 MFC set to  0.000000
5/21/2011	3:30:55 PM	BCl3 MFC set to  0.000000
5/21/2011	3:30:55 PM	PHl3 MFC set to  0.000000
5/21/2011	3:30:55 PM	SiCl4 MFC set to  0.000000
5/21/2011	3:30:55 PM	Bypass solenoid MFC set to  0.000000
5/21/2011	3:30:55 PM	Tube furnace set to 0
5/21/2011	3:31:55 PM	H2 valve closed
5/21/2011	3:31:55 PM	BCl3 valve closed
5/21/2011	3:31:55 PM	PH3 valve closed
5/21/2011	3:31:55 PM	SiCl4 pre valve closed
5/21/2011	3:31:55 PM	SiCl4 post valve closed
5/21/2011	3:31:55 PM	Bubbler valve closed
5/21/2011	3:31:55 PM	Helium valve opened
5/21/2011	3:31:55 PM	Main Vac valve opened
5/21/2011	3:31:55 PM	Bypass valve opened
5/21/2011	3:31:55 PM	Helium MFC set to  100.000000
5/21/2011	3:31:55 PM	H2 MFC set to  0.000000
5/21/2011	3:31:55 PM	BCl3 MFC set to  0.000000
5/21/2011	3:31:55 PM	PHl3 MFC set to  0.000000
5/21/2011	3:31:55 PM	SiCl4 MFC set to  0.000000
5/21/2011	3:31:55 PM	Bypass solenoid MFC set to  0.000000
5/21/2011	3:31:55 PM	Tube furnace set to 0
5/21/2011	3:32:56 PM	Helium valve closed
5/21/2011	3:32:56 PM	H2 valve closed
5/21/2011	3:32:56 PM	BCl3 valve closed
5/21/2011	3:32:56 PM	PH3 valve closed
5/21/2011	3:32:56 PM	SiCl4 pre valve closed
5/21/2011	3:32:56 PM	SiCl4 post valve closed
5/21/2011	3:32:56 PM	Bubbler valve closed
5/21/2011	3:32:56 PM	Main Vac valve opened
5/21/2011	3:32:56 PM	Bypass valve opened
5/21/2011	3:32:56 PM	Helium MFC set to  0.000000
5/21/2011	3:32:56 PM	H2 MFC set to  0.000000
5/21/2011	3:32:56 PM	BCl3 MFC set to  0.000000
5/21/2011	3:32:56 PM	PHl3 MFC set to  0.000000
5/21/2011	3:32:56 PM	SiCl4 MFC set to  0.000000
5/21/2011	3:32:56 PM	Bypass solenoid MFC set to  0.000000
5/21/2011	3:32:56 PM	Tube furnace set to 0
5/21/2011	3:33:56 PM	H2 valve closed
5/21/2011	3:33:56 PM	BCl3 valve closed
5/21/2011	3:33:56 PM	PH3 valve closed
5/21/2011	3:33:56 PM	SiCl4 pre valve closed
5/21/2011	3:33:56 PM	SiCl4 post valve closed
5/21/2011	3:33:56 PM	Bubbler valve closed
5/21/2011	3:33:56 PM	Helium valve opened
5/21/2011	3:33:56 PM	Main Vac valve opened
5/21/2011	3:33:56 PM	Bypass valve opened
5/21/2011	3:33:56 PM	Helium MFC set to  100.000000
5/21/2011	3:33:56 PM	H2 MFC set to  0.000000
5/21/2011	3:33:56 PM	BCl3 MFC set to  0.000000
5/21/2011	3:33:56 PM	PHl3 MFC set to  0.000000
5/21/2011	3:33:56 PM	SiCl4 MFC set to  0.000000
5/21/2011	3:33:56 PM	Bypass solenoid MFC set to  0.000000
5/21/2011	3:33:56 PM	Tube furnace set to 0
5/21/2011	3:34:56 PM	Helium valve closed
5/21/2011	3:34:56 PM	H2 valve closed
5/21/2011	3:34:56 PM	BCl3 valve closed
5/21/2011	3:34:56 PM	PH3 valve closed
5/21/2011	3:34:56 PM	SiCl4 pre valve closed
5/21/2011	3:34:56 PM	SiCl4 post valve closed
5/21/2011	3:34:56 PM	Bubbler valve closed
5/21/2011	3:34:56 PM	Main Vac valve opened
5/21/2011	3:34:56 PM	Bypass valve opened
5/21/2011	3:34:56 PM	Helium MFC set to  0.000000
5/21/2011	3:34:56 PM	H2 MFC set to  0.000000
5/21/2011	3:34:56 PM	BCl3 MFC set to  0.000000
5/21/2011	3:34:56 PM	PHl3 MFC set to  0.000000
5/21/2011	3:34:56 PM	SiCl4 MFC set to  0.000000
5/21/2011	3:34:56 PM	Bypass solenoid MFC set to  0.000000
5/21/2011	3:34:56 PM	Tube furnace set to 0
5/21/2011	3:35:56 PM	H2 valve closed
5/21/2011	3:35:56 PM	BCl3 valve closed
5/21/2011	3:35:56 PM	PH3 valve closed
5/21/2011	3:35:56 PM	SiCl4 pre valve closed
5/21/2011	3:35:56 PM	SiCl4 post valve closed
5/21/2011	3:35:56 PM	Bubbler valve closed
5/21/2011	3:35:56 PM	Helium valve opened
5/21/2011	3:35:56 PM	Main Vac valve opened
5/21/2011	3:35:56 PM	Bypass valve opened
5/21/2011	3:35:56 PM	Helium MFC set to  100.000000
5/21/2011	3:35:56 PM	H2 MFC set to  0.000000
5/21/2011	3:35:56 PM	BCl3 MFC set to  0.000000
5/21/2011	3:35:56 PM	PHl3 MFC set to  0.000000
5/21/2011	3:35:56 PM	SiCl4 MFC set to  0.000000
5/21/2011	3:35:56 PM	Bypass solenoid MFC set to  0.000000
5/21/2011	3:35:56 PM	Tube furnace set to 0
5/21/2011	3:36:56 PM	Helium valve closed
5/21/2011	3:36:56 PM	H2 valve closed
5/21/2011	3:36:56 PM	BCl3 valve closed
5/21/2011	3:36:56 PM	PH3 valve closed
5/21/2011	3:36:56 PM	SiCl4 pre valve closed
5/21/2011	3:36:56 PM	SiCl4 post valve closed
5/21/2011	3:36:56 PM	Bubbler valve closed
5/21/2011	3:36:56 PM	Main Vac valve opened
5/21/2011	3:36:56 PM	Bypass valve opened
5/21/2011	3:36:56 PM	Helium MFC set to  0.000000
5/21/2011	3:36:56 PM	H2 MFC set to  0.000000
5/21/2011	3:36:56 PM	BCl3 MFC set to  0.000000
5/21/2011	3:36:56 PM	PHl3 MFC set to  0.000000
5/21/2011	3:36:56 PM	SiCl4 MFC set to  0.000000
5/21/2011	3:36:56 PM	Bypass solenoid MFC set to  0.000000
5/21/2011	3:36:57 PM	Tube furnace set to 0
5/21/2011	3:37:57 PM	H2 valve closed
5/21/2011	3:37:57 PM	BCl3 valve closed
5/21/2011	3:37:57 PM	PH3 valve closed
5/21/2011	3:37:57 PM	SiCl4 pre valve closed
5/21/2011	3:37:57 PM	SiCl4 post valve closed
5/21/2011	3:37:57 PM	Bubbler valve closed
5/21/2011	3:37:57 PM	Helium valve opened
5/21/2011	3:37:57 PM	Main Vac valve opened
5/21/2011	3:37:57 PM	Bypass valve opened
5/21/2011	3:37:57 PM	Helium MFC set to  100.000000
5/21/2011	3:37:57 PM	H2 MFC set to  0.000000
5/21/2011	3:37:57 PM	BCl3 MFC set to  0.000000
5/21/2011	3:37:57 PM	PHl3 MFC set to  0.000000
5/21/2011	3:37:57 PM	SiCl4 MFC set to  0.000000
5/21/2011	3:37:57 PM	Bypass solenoid MFC set to  0.000000
5/21/2011	3:37:57 PM	Tube furnace set to 0
5/21/2011	3:38:57 PM	Helium valve closed
5/21/2011	3:38:57 PM	H2 valve closed
5/21/2011	3:38:57 PM	BCl3 valve closed
5/21/2011	3:38:57 PM	PH3 valve closed
5/21/2011	3:38:57 PM	SiCl4 pre valve closed
5/21/2011	3:38:57 PM	SiCl4 post valve closed
5/21/2011	3:38:57 PM	Bubbler valve closed
5/21/2011	3:38:57 PM	Main Vac valve opened
5/21/2011	3:38:57 PM	Bypass valve opened
5/21/2011	3:38:57 PM	Helium MFC set to  0.000000
5/21/2011	3:38:57 PM	H2 MFC set to  0.000000
5/21/2011	3:38:57 PM	BCl3 MFC set to  0.000000
5/21/2011	3:38:57 PM	PHl3 MFC set to  0.000000
5/21/2011	3:38:57 PM	SiCl4 MFC set to  0.000000
5/21/2011	3:38:57 PM	Bypass solenoid MFC set to  0.000000
5/21/2011	3:38:57 PM	Tube furnace set to 0
5/21/2011	3:39:57 PM	H2 valve closed
5/21/2011	3:39:57 PM	BCl3 valve closed
5/21/2011	3:39:57 PM	PH3 valve closed
5/21/2011	3:39:57 PM	SiCl4 pre valve closed
5/21/2011	3:39:57 PM	SiCl4 post valve closed
5/21/2011	3:39:57 PM	Bubbler valve closed
5/21/2011	3:39:57 PM	Helium valve opened
5/21/2011	3:39:57 PM	Main Vac valve opened
5/21/2011	3:39:57 PM	Bypass valve opened
5/21/2011	3:39:57 PM	Helium MFC set to  100.000000
5/21/2011	3:39:57 PM	H2 MFC set to  0.000000
5/21/2011	3:39:57 PM	BCl3 MFC set to  0.000000
5/21/2011	3:39:57 PM	PHl3 MFC set to  0.000000
5/21/2011	3:39:57 PM	SiCl4 MFC set to  0.000000
5/21/2011	3:39:57 PM	Bypass solenoid MFC set to  0.000000
5/21/2011	3:39:57 PM	Tube furnace set to 0
5/21/2011	3:40:57 PM	Helium valve closed
5/21/2011	3:40:57 PM	H2 valve closed
5/21/2011	3:40:57 PM	BCl3 valve closed
5/21/2011	3:40:57 PM	PH3 valve closed
5/21/2011	3:40:57 PM	SiCl4 pre valve closed
5/21/2011	3:40:57 PM	SiCl4 post valve closed
5/21/2011	3:40:57 PM	Bubbler valve closed
5/21/2011	3:40:57 PM	Main Vac valve opened
5/21/2011	3:40:57 PM	Bypass valve opened
5/21/2011	3:40:57 PM	Helium MFC set to  0.000000
5/21/2011	3:40:57 PM	H2 MFC set to  0.000000
5/21/2011	3:40:57 PM	BCl3 MFC set to  0.000000
5/21/2011	3:40:57 PM	PHl3 MFC set to  0.000000
5/21/2011	3:40:57 PM	SiCl4 MFC set to  0.000000
5/21/2011	3:40:57 PM	Bypass solenoid MFC set to  0.000000
5/21/2011	3:40:57 PM	Tube furnace set to 0
5/21/2011	3:40:58 PM	Run finished at 3:40 PM
5/21/2011	3:40:58 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
5/21/2011	3:44:07 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
5/21/2011	3:44:18 PM	Recipe started at 3:44 PM
5/21/2011	3:44:18 PM	Helium valve closed
5/21/2011	3:44:18 PM	H2 valve closed
5/21/2011	3:44:18 PM	BCl3 valve closed
5/21/2011	3:44:18 PM	PH3 valve closed
5/21/2011	3:44:18 PM	SiCl4 pre valve closed
5/21/2011	3:44:18 PM	SiCl4 post valve closed
5/21/2011	3:44:18 PM	Main Vac valve closed
5/21/2011	3:44:18 PM	Bubbler valve closed
5/21/2011	3:44:18 PM	Bypass valve opened
5/21/2011	3:44:18 PM	Helium MFC set to  0.000000
5/21/2011	3:44:18 PM	H2 MFC set to  0.000000
5/21/2011	3:44:18 PM	BCl3 MFC set to  0.000000
5/21/2011	3:44:18 PM	PHl3 MFC set to  0.000000
5/21/2011	3:44:18 PM	SiCl4 MFC set to  0.000000
5/21/2011	3:44:18 PM	Bypass solenoid MFC set to  0.000000
5/21/2011	3:44:19 PM	Tube furnace set to 0
5/21/2011	3:44:19 PM	Helium valve closed
5/21/2011	3:44:19 PM	H2 valve closed
5/21/2011	3:44:19 PM	BCl3 valve closed
5/21/2011	3:44:19 PM	PH3 valve closed
5/21/2011	3:44:19 PM	SiCl4 pre valve closed
5/21/2011	3:44:19 PM	SiCl4 post valve closed
5/21/2011	3:44:19 PM	Bubbler valve closed
5/21/2011	3:44:19 PM	Main Vac valve opened
5/21/2011	3:44:19 PM	Bypass valve opened
5/21/2011	3:44:19 PM	Helium MFC set to  0.000000
5/21/2011	3:44:19 PM	H2 MFC set to  0.000000
5/21/2011	3:44:19 PM	BCl3 MFC set to  0.000000
5/21/2011	3:44:19 PM	PHl3 MFC set to  0.000000
5/21/2011	3:44:19 PM	SiCl4 MFC set to  0.000000
5/21/2011	3:44:19 PM	Bypass solenoid MFC set to  0.000000
5/21/2011	3:44:19 PM	Tube furnace set to 0
5/21/2011	3:45:19 PM	H2 valve closed
5/21/2011	3:45:19 PM	BCl3 valve closed
5/21/2011	3:45:19 PM	PH3 valve closed
5/21/2011	3:45:19 PM	SiCl4 pre valve closed
5/21/2011	3:45:19 PM	SiCl4 post valve closed
5/21/2011	3:45:19 PM	Bubbler valve closed
5/21/2011	3:45:19 PM	Helium valve opened
5/21/2011	3:45:19 PM	Main Vac valve opened
5/21/2011	3:45:19 PM	Bypass valve opened
5/21/2011	3:45:19 PM	Helium MFC set to  100.000000
5/21/2011	3:45:19 PM	H2 MFC set to  0.000000
5/21/2011	3:45:19 PM	BCl3 MFC set to  0.000000
5/21/2011	3:45:19 PM	PHl3 MFC set to  0.000000
5/21/2011	3:45:19 PM	SiCl4 MFC set to  0.000000
5/21/2011	3:45:19 PM	Bypass solenoid MFC set to  0.000000
5/21/2011	3:45:19 PM	Tube furnace set to 0
5/21/2011	3:46:19 PM	Helium valve closed
5/21/2011	3:46:19 PM	H2 valve closed
5/21/2011	3:46:19 PM	BCl3 valve closed
5/21/2011	3:46:19 PM	PH3 valve closed
5/21/2011	3:46:19 PM	SiCl4 pre valve closed
5/21/2011	3:46:19 PM	SiCl4 post valve closed
5/21/2011	3:46:19 PM	Bubbler valve closed
5/21/2011	3:46:19 PM	Main Vac valve opened
5/21/2011	3:46:19 PM	Bypass valve opened
5/21/2011	3:46:19 PM	Helium MFC set to  0.000000
5/21/2011	3:46:19 PM	H2 MFC set to  0.000000
5/21/2011	3:46:19 PM	BCl3 MFC set to  0.000000
5/21/2011	3:46:19 PM	PHl3 MFC set to  0.000000
5/21/2011	3:46:19 PM	SiCl4 MFC set to  0.000000
5/21/2011	3:46:19 PM	Bypass solenoid MFC set to  0.000000
5/21/2011	3:46:19 PM	Tube furnace set to 0
5/21/2011	3:47:19 PM	H2 valve closed
5/21/2011	3:47:19 PM	BCl3 valve closed
5/21/2011	3:47:19 PM	PH3 valve closed
5/21/2011	3:47:19 PM	SiCl4 pre valve closed
5/21/2011	3:47:19 PM	SiCl4 post valve closed
5/21/2011	3:47:19 PM	Bubbler valve closed
5/21/2011	3:47:19 PM	Helium valve opened
5/21/2011	3:47:19 PM	Main Vac valve opened
5/21/2011	3:47:19 PM	Bypass valve opened
5/21/2011	3:47:19 PM	Helium MFC set to  100.000000
5/21/2011	3:47:19 PM	H2 MFC set to  0.000000
5/21/2011	3:47:19 PM	BCl3 MFC set to  0.000000
5/21/2011	3:47:19 PM	PHl3 MFC set to  0.000000
5/21/2011	3:47:19 PM	SiCl4 MFC set to  0.000000
5/21/2011	3:47:19 PM	Bypass solenoid MFC set to  0.000000
5/21/2011	3:47:20 PM	Tube furnace set to 0
5/21/2011	3:48:20 PM	Helium valve closed
5/21/2011	3:48:20 PM	H2 valve closed
5/21/2011	3:48:20 PM	BCl3 valve closed
5/21/2011	3:48:20 PM	PH3 valve closed
5/21/2011	3:48:20 PM	SiCl4 pre valve closed
5/21/2011	3:48:20 PM	SiCl4 post valve closed
5/21/2011	3:48:20 PM	Bubbler valve closed
5/21/2011	3:48:20 PM	Main Vac valve opened
5/21/2011	3:48:20 PM	Bypass valve opened
5/21/2011	3:48:20 PM	Helium MFC set to  0.000000
5/21/2011	3:48:20 PM	H2 MFC set to  0.000000
5/21/2011	3:48:20 PM	BCl3 MFC set to  0.000000
5/21/2011	3:48:20 PM	PHl3 MFC set to  0.000000
5/21/2011	3:48:20 PM	SiCl4 MFC set to  0.000000
5/21/2011	3:48:20 PM	Bypass solenoid MFC set to  0.000000
5/21/2011	3:48:20 PM	Tube furnace set to 0
5/21/2011	3:49:20 PM	H2 valve closed
5/21/2011	3:49:20 PM	BCl3 valve closed
5/21/2011	3:49:20 PM	PH3 valve closed
5/21/2011	3:49:20 PM	SiCl4 pre valve closed
5/21/2011	3:49:20 PM	SiCl4 post valve closed
5/21/2011	3:49:20 PM	Bubbler valve closed
5/21/2011	3:49:20 PM	Helium valve opened
5/21/2011	3:49:20 PM	Main Vac valve opened
5/21/2011	3:49:20 PM	Bypass valve opened
5/21/2011	3:49:20 PM	Helium MFC set to  100.000000
5/21/2011	3:49:20 PM	H2 MFC set to  0.000000
5/21/2011	3:49:20 PM	BCl3 MFC set to  0.000000
5/21/2011	3:49:20 PM	PHl3 MFC set to  0.000000
5/21/2011	3:49:20 PM	SiCl4 MFC set to  0.000000
5/21/2011	3:49:20 PM	Bypass solenoid MFC set to  0.000000
5/21/2011	3:49:20 PM	Tube furnace set to 0
5/21/2011	3:50:20 PM	Helium valve closed
5/21/2011	3:50:20 PM	H2 valve closed
5/21/2011	3:50:20 PM	BCl3 valve closed
5/21/2011	3:50:20 PM	PH3 valve closed
5/21/2011	3:50:20 PM	SiCl4 pre valve closed
5/21/2011	3:50:20 PM	SiCl4 post valve closed
5/21/2011	3:50:20 PM	Bubbler valve closed
5/21/2011	3:50:20 PM	Main Vac valve opened
5/21/2011	3:50:20 PM	Bypass valve opened
5/21/2011	3:50:20 PM	Helium MFC set to  0.000000
5/21/2011	3:50:20 PM	H2 MFC set to  0.000000
5/21/2011	3:50:20 PM	BCl3 MFC set to  0.000000
5/21/2011	3:50:20 PM	PHl3 MFC set to  0.000000
5/21/2011	3:50:20 PM	SiCl4 MFC set to  0.000000
5/21/2011	3:50:20 PM	Bypass solenoid MFC set to  0.000000
5/21/2011	3:50:20 PM	Tube furnace set to 0
5/21/2011	3:51:20 PM	H2 valve closed
5/21/2011	3:51:20 PM	BCl3 valve closed
5/21/2011	3:51:20 PM	PH3 valve closed
5/21/2011	3:51:20 PM	SiCl4 pre valve closed
5/21/2011	3:51:20 PM	SiCl4 post valve closed
5/21/2011	3:51:20 PM	Bubbler valve closed
5/21/2011	3:51:20 PM	Helium valve opened
5/21/2011	3:51:20 PM	Main Vac valve opened
5/21/2011	3:51:20 PM	Bypass valve opened
5/21/2011	3:51:20 PM	Helium MFC set to  100.000000
5/21/2011	3:51:20 PM	H2 MFC set to  0.000000
5/21/2011	3:51:20 PM	BCl3 MFC set to  0.000000
5/21/2011	3:51:20 PM	PHl3 MFC set to  0.000000
5/21/2011	3:51:20 PM	SiCl4 MFC set to  0.000000
5/21/2011	3:51:20 PM	Bypass solenoid MFC set to  0.000000
5/21/2011	3:51:20 PM	Tube furnace set to 0
5/21/2011	3:52:20 PM	Helium valve closed
5/21/2011	3:52:20 PM	H2 valve closed
5/21/2011	3:52:20 PM	BCl3 valve closed
5/21/2011	3:52:20 PM	PH3 valve closed
5/21/2011	3:52:20 PM	SiCl4 pre valve closed
5/21/2011	3:52:20 PM	SiCl4 post valve closed
5/21/2011	3:52:20 PM	Bubbler valve closed
5/21/2011	3:52:20 PM	Main Vac valve opened
5/21/2011	3:52:20 PM	Bypass valve opened
5/21/2011	3:52:20 PM	Helium MFC set to  0.000000
5/21/2011	3:52:20 PM	H2 MFC set to  0.000000
5/21/2011	3:52:20 PM	BCl3 MFC set to  0.000000
5/21/2011	3:52:20 PM	PHl3 MFC set to  0.000000
5/21/2011	3:52:20 PM	SiCl4 MFC set to  0.000000
5/21/2011	3:52:20 PM	Bypass solenoid MFC set to  0.000000
5/21/2011	3:52:21 PM	Tube furnace set to 0
5/21/2011	3:53:21 PM	H2 valve closed
5/21/2011	3:53:21 PM	BCl3 valve closed
5/21/2011	3:53:21 PM	PH3 valve closed
5/21/2011	3:53:21 PM	SiCl4 pre valve closed
5/21/2011	3:53:21 PM	SiCl4 post valve closed
5/21/2011	3:53:21 PM	Bubbler valve closed
5/21/2011	3:53:21 PM	Helium valve opened
5/21/2011	3:53:21 PM	Main Vac valve opened
5/21/2011	3:53:21 PM	Bypass valve opened
5/21/2011	3:53:21 PM	Helium MFC set to  100.000000
5/21/2011	3:53:21 PM	H2 MFC set to  0.000000
5/21/2011	3:53:21 PM	BCl3 MFC set to  0.000000
5/21/2011	3:53:21 PM	PHl3 MFC set to  0.000000
5/21/2011	3:53:21 PM	SiCl4 MFC set to  0.000000
5/21/2011	3:53:21 PM	Bypass solenoid MFC set to  0.000000
5/21/2011	3:53:21 PM	Tube furnace set to 0
5/21/2011	3:54:21 PM	Helium valve closed
5/21/2011	3:54:21 PM	H2 valve closed
5/21/2011	3:54:21 PM	BCl3 valve closed
5/21/2011	3:54:21 PM	PH3 valve closed
5/21/2011	3:54:21 PM	SiCl4 pre valve closed
5/21/2011	3:54:21 PM	SiCl4 post valve closed
5/21/2011	3:54:21 PM	Bubbler valve closed
5/21/2011	3:54:21 PM	Main Vac valve opened
5/21/2011	3:54:21 PM	Bypass valve opened
5/21/2011	3:54:21 PM	Helium MFC set to  0.000000
5/21/2011	3:54:21 PM	H2 MFC set to  0.000000
5/21/2011	3:54:21 PM	BCl3 MFC set to  0.000000
5/21/2011	3:54:21 PM	PHl3 MFC set to  0.000000
5/21/2011	3:54:21 PM	SiCl4 MFC set to  0.000000
5/21/2011	3:54:21 PM	Bypass solenoid MFC set to  0.000000
5/21/2011	3:54:21 PM	Tube furnace set to 0
5/21/2011	3:55:21 PM	H2 valve closed
5/21/2011	3:55:21 PM	BCl3 valve closed
5/21/2011	3:55:21 PM	PH3 valve closed
5/21/2011	3:55:21 PM	SiCl4 pre valve closed
5/21/2011	3:55:21 PM	SiCl4 post valve closed
5/21/2011	3:55:21 PM	Bubbler valve closed
5/21/2011	3:55:21 PM	Helium valve opened
5/21/2011	3:55:21 PM	Main Vac valve opened
5/21/2011	3:55:21 PM	Bypass valve opened
5/21/2011	3:55:21 PM	Helium MFC set to  100.000000
5/21/2011	3:55:21 PM	H2 MFC set to  0.000000
5/21/2011	3:55:21 PM	BCl3 MFC set to  0.000000
5/21/2011	3:55:21 PM	PHl3 MFC set to  0.000000
5/21/2011	3:55:21 PM	SiCl4 MFC set to  0.000000
5/21/2011	3:55:21 PM	Bypass solenoid MFC set to  0.000000
5/21/2011	3:55:21 PM	Tube furnace set to 0
5/21/2011	3:56:21 PM	Helium valve closed
5/21/2011	3:56:21 PM	H2 valve closed
5/21/2011	3:56:21 PM	BCl3 valve closed
5/21/2011	3:56:21 PM	PH3 valve closed
5/21/2011	3:56:21 PM	SiCl4 pre valve closed
5/21/2011	3:56:21 PM	SiCl4 post valve closed
5/21/2011	3:56:21 PM	Bubbler valve closed
5/21/2011	3:56:21 PM	Main Vac valve opened
5/21/2011	3:56:21 PM	Bypass valve opened
5/21/2011	3:56:21 PM	Helium MFC set to  0.000000
5/21/2011	3:56:21 PM	H2 MFC set to  0.000000
5/21/2011	3:56:21 PM	BCl3 MFC set to  0.000000
5/21/2011	3:56:21 PM	PHl3 MFC set to  0.000000
5/21/2011	3:56:21 PM	SiCl4 MFC set to  0.000000
5/21/2011	3:56:21 PM	Bypass solenoid MFC set to  0.000000
5/21/2011	3:56:21 PM	Tube furnace set to 0
5/21/2011	3:57:21 PM	H2 valve closed
5/21/2011	3:57:21 PM	BCl3 valve closed
5/21/2011	3:57:21 PM	PH3 valve closed
5/21/2011	3:57:21 PM	SiCl4 pre valve closed
5/21/2011	3:57:21 PM	SiCl4 post valve closed
5/21/2011	3:57:21 PM	Bubbler valve closed
5/21/2011	3:57:21 PM	Helium valve opened
5/21/2011	3:57:21 PM	Main Vac valve opened
5/21/2011	3:57:21 PM	Bypass valve opened
5/21/2011	3:57:21 PM	Helium MFC set to  100.000000
5/21/2011	3:57:21 PM	H2 MFC set to  0.000000
5/21/2011	3:57:21 PM	BCl3 MFC set to  0.000000
5/21/2011	3:57:21 PM	PHl3 MFC set to  0.000000
5/21/2011	3:57:22 PM	SiCl4 MFC set to  0.000000
5/21/2011	3:57:22 PM	Bypass solenoid MFC set to  0.000000
5/21/2011	3:57:22 PM	Tube furnace set to 0
5/21/2011	3:58:22 PM	Helium valve closed
5/21/2011	3:58:22 PM	H2 valve closed
5/21/2011	3:58:22 PM	BCl3 valve closed
5/21/2011	3:58:22 PM	PH3 valve closed
5/21/2011	3:58:22 PM	SiCl4 pre valve closed
5/21/2011	3:58:22 PM	SiCl4 post valve closed
5/21/2011	3:58:22 PM	Bubbler valve closed
5/21/2011	3:58:22 PM	Main Vac valve opened
5/21/2011	3:58:22 PM	Bypass valve opened
5/21/2011	3:58:22 PM	Helium MFC set to  0.000000
5/21/2011	3:58:22 PM	H2 MFC set to  0.000000
5/21/2011	3:58:22 PM	BCl3 MFC set to  0.000000
5/21/2011	3:58:22 PM	PHl3 MFC set to  0.000000
5/21/2011	3:58:22 PM	SiCl4 MFC set to  0.000000
5/21/2011	3:58:22 PM	Bypass solenoid MFC set to  0.000000
5/21/2011	3:58:22 PM	Tube furnace set to 0
5/21/2011	3:59:22 PM	H2 valve closed
5/21/2011	3:59:22 PM	BCl3 valve closed
5/21/2011	3:59:22 PM	PH3 valve closed
5/21/2011	3:59:22 PM	SiCl4 pre valve closed
5/21/2011	3:59:22 PM	SiCl4 post valve closed
5/21/2011	3:59:22 PM	Bubbler valve closed
5/21/2011	3:59:22 PM	Helium valve opened
5/21/2011	3:59:22 PM	Main Vac valve opened
5/21/2011	3:59:22 PM	Bypass valve opened
5/21/2011	3:59:22 PM	Helium MFC set to  100.000000
5/21/2011	3:59:22 PM	H2 MFC set to  0.000000
5/21/2011	3:59:22 PM	BCl3 MFC set to  0.000000
5/21/2011	3:59:22 PM	PHl3 MFC set to  0.000000
5/21/2011	3:59:22 PM	SiCl4 MFC set to  0.000000
5/21/2011	3:59:22 PM	Bypass solenoid MFC set to  0.000000
5/21/2011	3:59:22 PM	Tube furnace set to 0
5/21/2011	4:00:22 PM	Helium valve closed
5/21/2011	4:00:22 PM	H2 valve closed
5/21/2011	4:00:22 PM	BCl3 valve closed
5/21/2011	4:00:22 PM	PH3 valve closed
5/21/2011	4:00:22 PM	SiCl4 pre valve closed
5/21/2011	4:00:22 PM	SiCl4 post valve closed
5/21/2011	4:00:22 PM	Bubbler valve closed
5/21/2011	4:00:22 PM	Main Vac valve opened
5/21/2011	4:00:22 PM	Bypass valve opened
5/21/2011	4:00:22 PM	Helium MFC set to  0.000000
5/21/2011	4:00:22 PM	H2 MFC set to  0.000000
5/21/2011	4:00:22 PM	BCl3 MFC set to  0.000000
5/21/2011	4:00:22 PM	PHl3 MFC set to  0.000000
5/21/2011	4:00:22 PM	SiCl4 MFC set to  0.000000
5/21/2011	4:00:22 PM	Bypass solenoid MFC set to  0.000000
5/21/2011	4:00:22 PM	Tube furnace set to 0
5/21/2011	4:01:22 PM	H2 valve closed
5/21/2011	4:01:22 PM	BCl3 valve closed
5/21/2011	4:01:22 PM	PH3 valve closed
5/21/2011	4:01:22 PM	SiCl4 pre valve closed
5/21/2011	4:01:22 PM	SiCl4 post valve closed
5/21/2011	4:01:22 PM	Bubbler valve closed
5/21/2011	4:01:22 PM	Helium valve opened
5/21/2011	4:01:22 PM	Main Vac valve opened
5/21/2011	4:01:22 PM	Bypass valve opened
5/21/2011	4:01:22 PM	Helium MFC set to  100.000000
5/21/2011	4:01:22 PM	H2 MFC set to  0.000000
5/21/2011	4:01:22 PM	BCl3 MFC set to  0.000000
5/21/2011	4:01:22 PM	PHl3 MFC set to  0.000000
5/21/2011	4:01:22 PM	SiCl4 MFC set to  0.000000
5/21/2011	4:01:22 PM	Bypass solenoid MFC set to  0.000000
5/21/2011	4:01:22 PM	Tube furnace set to 0
5/21/2011	4:02:22 PM	Helium valve closed
5/21/2011	4:02:22 PM	H2 valve closed
5/21/2011	4:02:22 PM	BCl3 valve closed
5/21/2011	4:02:22 PM	PH3 valve closed
5/21/2011	4:02:22 PM	SiCl4 pre valve closed
5/21/2011	4:02:22 PM	SiCl4 post valve closed
5/21/2011	4:02:22 PM	Bubbler valve closed
5/21/2011	4:02:23 PM	Main Vac valve opened
5/21/2011	4:02:23 PM	Bypass valve opened
5/21/2011	4:02:23 PM	Helium MFC set to  0.000000
5/21/2011	4:02:23 PM	H2 MFC set to  0.000000
5/21/2011	4:02:23 PM	BCl3 MFC set to  0.000000
5/21/2011	4:02:23 PM	PHl3 MFC set to  0.000000
5/21/2011	4:02:23 PM	SiCl4 MFC set to  0.000000
5/21/2011	4:02:23 PM	Bypass solenoid MFC set to  0.000000
5/21/2011	4:02:23 PM	Tube furnace set to 0
5/21/2011	4:03:23 PM	H2 valve closed
5/21/2011	4:03:23 PM	BCl3 valve closed
5/21/2011	4:03:23 PM	PH3 valve closed
5/21/2011	4:03:23 PM	SiCl4 pre valve closed
5/21/2011	4:03:23 PM	SiCl4 post valve closed
5/21/2011	4:03:23 PM	Bubbler valve closed
5/21/2011	4:03:23 PM	Helium valve opened
5/21/2011	4:03:23 PM	Main Vac valve opened
5/21/2011	4:03:23 PM	Bypass valve opened
5/21/2011	4:03:23 PM	Helium MFC set to  100.000000
5/21/2011	4:03:23 PM	H2 MFC set to  0.000000
5/21/2011	4:03:23 PM	BCl3 MFC set to  0.000000
5/21/2011	4:03:23 PM	PHl3 MFC set to  0.000000
5/21/2011	4:03:23 PM	SiCl4 MFC set to  0.000000
5/21/2011	4:03:23 PM	Bypass solenoid MFC set to  0.000000
5/21/2011	4:03:23 PM	Tube furnace set to 0
5/21/2011	4:04:23 PM	Helium valve closed
5/21/2011	4:04:23 PM	H2 valve closed
5/21/2011	4:04:23 PM	BCl3 valve closed
5/21/2011	4:04:23 PM	PH3 valve closed
5/21/2011	4:04:23 PM	SiCl4 pre valve closed
5/21/2011	4:04:23 PM	SiCl4 post valve closed
5/21/2011	4:04:23 PM	Bubbler valve closed
5/21/2011	4:04:23 PM	Main Vac valve opened
5/21/2011	4:04:23 PM	Bypass valve opened
5/21/2011	4:04:23 PM	Helium MFC set to  0.000000
5/21/2011	4:04:23 PM	H2 MFC set to  0.000000
5/21/2011	4:04:23 PM	BCl3 MFC set to  0.000000
5/21/2011	4:04:23 PM	PHl3 MFC set to  0.000000
5/21/2011	4:04:23 PM	SiCl4 MFC set to  0.000000
5/21/2011	4:04:23 PM	Bypass solenoid MFC set to  0.000000
5/21/2011	4:04:23 PM	Tube furnace set to 0
5/21/2011	4:04:24 PM	Run finished at 4:04 PM
5/21/2011	4:04:24 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
5/21/2011	4:06:54 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
5/21/2011	4:06:54 PM	Recipe started at 4:06 PM
5/21/2011	4:06:54 PM	Helium valve closed
5/21/2011	4:06:54 PM	H2 valve closed
5/21/2011	4:06:54 PM	BCl3 valve closed
5/21/2011	4:06:54 PM	PH3 valve closed
5/21/2011	4:06:54 PM	SiCl4 pre valve closed
5/21/2011	4:06:54 PM	SiCl4 post valve closed
5/21/2011	4:06:54 PM	Main Vac valve closed
5/21/2011	4:06:54 PM	Bypass valve closed
5/21/2011	4:06:54 PM	Bubbler valve closed
5/21/2011	4:06:54 PM	Helium MFC set to  0.000000
5/21/2011	4:06:54 PM	H2 MFC set to  0.000000
5/21/2011	4:06:54 PM	BCl3 MFC set to  0.000000
5/21/2011	4:06:54 PM	PHl3 MFC set to  0.000000
5/21/2011	4:06:54 PM	SiCl4 MFC set to  0.000000
5/21/2011	4:06:54 PM	Bypass solenoid MFC set to  0.000000
5/21/2011	4:06:54 PM	Tube furnace set to 0
5/21/2011	4:06:54 PM	Run finished at 4:06 PM
5/21/2011	4:06:54 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
5/21/2011	4:07:07 PM	Recipe started at 4:07 PM
5/21/2011	4:07:07 PM	Helium valve closed
5/21/2011	4:07:07 PM	BCl3 valve closed
5/21/2011	4:07:07 PM	PH3 valve closed
5/21/2011	4:07:07 PM	SiCl4 pre valve closed
5/21/2011	4:07:07 PM	SiCl4 post valve closed
5/21/2011	4:07:07 PM	Main Vac valve closed
5/21/2011	4:07:07 PM	Bypass valve closed
5/21/2011	4:07:07 PM	Bubbler valve closed
5/21/2011	4:07:07 PM	H2 valve opened
5/21/2011	4:07:07 PM	Helium MFC set to  0.000000
5/21/2011	4:07:07 PM	H2 MFC set to  500.000000
5/21/2011	4:07:07 PM	BCl3 MFC set to  0.000000
5/21/2011	4:07:07 PM	PHl3 MFC set to  0.000000
5/21/2011	4:07:07 PM	SiCl4 MFC set to  0.000000
5/21/2011	4:07:07 PM	Bypass solenoid MFC set to  0.000000
5/21/2011	4:07:07 PM	Tube furnace set to 0
5/21/2011	4:08:28 PM	Helium valve closed
5/21/2011	4:08:28 PM	BCl3 valve closed
5/21/2011	4:08:28 PM	PH3 valve closed
5/21/2011	4:08:28 PM	SiCl4 pre valve closed
5/21/2011	4:08:28 PM	SiCl4 post valve closed
5/21/2011	4:08:28 PM	Main Vac valve closed
5/21/2011	4:08:28 PM	Bypass valve closed
5/21/2011	4:08:28 PM	H2 valve opened
5/21/2011	4:08:28 PM	Bubbler valve opened
5/21/2011	4:08:28 PM	Helium MFC set to  0.000000
5/21/2011	4:08:28 PM	H2 MFC set to  500.000000
5/21/2011	4:08:28 PM	BCl3 MFC set to  0.000000
5/21/2011	4:08:28 PM	PHl3 MFC set to  0.000000
5/21/2011	4:08:28 PM	SiCl4 MFC set to  0.000000
5/21/2011	4:08:28 PM	Bypass solenoid MFC set to  0.000000
5/21/2011	4:08:28 PM	Tube furnace set to 250
5/21/2011	4:28:28 PM	Helium valve closed
5/21/2011	4:28:28 PM	BCl3 valve closed
5/21/2011	4:28:28 PM	PH3 valve closed
5/21/2011	4:28:28 PM	SiCl4 pre valve closed
5/21/2011	4:28:28 PM	SiCl4 post valve closed
5/21/2011	4:28:28 PM	Main Vac valve closed
5/21/2011	4:28:28 PM	Bypass valve closed
5/21/2011	4:28:28 PM	H2 valve opened
5/21/2011	4:28:28 PM	Bubbler valve opened
5/21/2011	4:28:28 PM	Helium MFC set to  0.000000
5/21/2011	4:28:28 PM	H2 MFC set to  500.000000
5/21/2011	4:28:28 PM	BCl3 MFC set to  0.000000
5/21/2011	4:28:28 PM	PHl3 MFC set to  0.000000
5/21/2011	4:28:28 PM	SiCl4 MFC set to  0.000000
5/21/2011	4:28:28 PM	Bypass solenoid MFC set to  0.000000
5/21/2011	4:28:28 PM	Tube furnace set to 1000
5/21/2011	4:48:28 PM	Helium valve closed
5/21/2011	4:48:28 PM	BCl3 valve closed
5/21/2011	4:48:28 PM	Main Vac valve closed
5/21/2011	4:48:28 PM	Bypass valve closed
5/21/2011	4:48:28 PM	H2 valve opened
5/21/2011	4:48:28 PM	PH3 valve opened
5/21/2011	4:48:28 PM	SiCl4 pre valve opened
5/21/2011	4:48:28 PM	SiCl4 post valve opened
5/21/2011	4:48:28 PM	Bubbler valve opened
5/21/2011	4:48:28 PM	Helium MFC set to  0.000000
5/21/2011	4:48:28 PM	H2 MFC set to  500.000000
5/21/2011	4:48:28 PM	BCl3 MFC set to  0.000000
5/21/2011	4:48:28 PM	PHl3 MFC set to  1.000000
5/21/2011	4:48:28 PM	SiCl4 MFC set to  75.000000
5/21/2011	4:48:28 PM	Bypass solenoid MFC set to  0.000000
5/21/2011	4:48:29 PM	Tube furnace set to 1000
5/21/2011	5:04:28 PM	H2 valve closed
5/21/2011	5:04:28 PM	BCl3 valve closed
5/21/2011	5:04:28 PM	PH3 valve closed
5/21/2011	5:04:29 PM	SiCl4 pre valve closed
5/21/2011	5:04:29 PM	SiCl4 post valve closed
5/21/2011	5:04:29 PM	Main Vac valve closed
5/21/2011	5:04:29 PM	Bypass valve closed
5/21/2011	5:04:29 PM	Helium valve opened
5/21/2011	5:04:29 PM	Bubbler valve opened
5/21/2011	5:04:29 PM	Helium MFC set to  500.000000
5/21/2011	5:04:29 PM	H2 MFC set to  0.000000
5/21/2011	5:04:29 PM	BCl3 MFC set to  0.000000
5/21/2011	5:04:29 PM	PHl3 MFC set to  0.000000
5/21/2011	5:04:29 PM	SiCl4 MFC set to  0.000000
5/21/2011	5:04:29 PM	Bypass solenoid MFC set to  0.000000
5/21/2011	5:04:29 PM	Tube furnace set to 0
5/21/2011	5:24:29 PM	Helium valve closed
5/21/2011	5:24:29 PM	H2 valve closed
5/21/2011	5:24:29 PM	BCl3 valve closed
5/21/2011	5:24:29 PM	PH3 valve closed
5/21/2011	5:24:29 PM	SiCl4 pre valve closed
5/21/2011	5:24:29 PM	SiCl4 post valve closed
5/21/2011	5:24:29 PM	Main Vac valve closed
5/21/2011	5:24:29 PM	Bypass valve closed
5/21/2011	5:24:29 PM	Bubbler valve closed
5/21/2011	5:24:29 PM	Helium MFC set to  0.000000
5/21/2011	5:24:29 PM	H2 MFC set to  0.000000
5/21/2011	5:24:29 PM	BCl3 MFC set to  0.000000
5/21/2011	5:24:29 PM	PHl3 MFC set to  0.000000
5/21/2011	5:24:29 PM	SiCl4 MFC set to  0.000000
5/21/2011	5:24:29 PM	Bypass solenoid MFC set to  0.000000
5/21/2011	5:24:29 PM	Tube furnace set to 0
5/21/2011	5:24:29 PM	Run finished at 5:24 PM
5/21/2011	6:14:53 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/21/2011	6:14:54 PM	Recipe started at 6:14 PM
5/21/2011	6:14:54 PM	H2 valve closed
5/21/2011	6:14:54 PM	BCl3 valve closed
5/21/2011	6:14:54 PM	PH3 valve closed
5/21/2011	6:14:54 PM	SiCl4 pre valve closed
5/21/2011	6:14:54 PM	SiCl4 post valve closed
5/21/2011	6:14:54 PM	Main Vac valve closed
5/21/2011	6:14:54 PM	Bypass valve closed
5/21/2011	6:14:54 PM	Bubbler valve closed
5/21/2011	6:14:54 PM	Helium valve opened
5/21/2011	6:14:54 PM	Helium MFC set to  500.000000
5/21/2011	6:14:54 PM	H2 MFC set to  0.000000
5/21/2011	6:14:54 PM	BCl3 MFC set to  0.000000
5/21/2011	6:14:54 PM	PHl3 MFC set to  0.000000
5/21/2011	6:14:54 PM	SiCl4 MFC set to  0.000000
5/21/2011	6:14:54 PM	Bypass solenoid MFC set to  0.000000
5/21/2011	6:14:54 PM	Tube furnace set to 0
5/21/2011	6:14:57 PM	Helium valve closed
5/21/2011	6:14:57 PM	H2 valve closed
5/21/2011	6:14:57 PM	BCl3 valve closed
5/21/2011	6:14:57 PM	PH3 valve closed
5/21/2011	6:14:57 PM	SiCl4 pre valve closed
5/21/2011	6:14:57 PM	SiCl4 post valve closed
5/21/2011	6:14:57 PM	Main Vac valve closed
5/21/2011	6:14:57 PM	Bypass valve closed
5/21/2011	6:14:57 PM	Bubbler valve closed
5/21/2011	6:14:57 PM	Helium MFC set to  0.000000
5/21/2011	6:14:57 PM	H2 MFC set to  0.000000
5/21/2011	6:14:57 PM	BCl3 MFC set to  0.000000
5/21/2011	6:14:57 PM	PHl3 MFC set to  0.000000
5/21/2011	6:14:57 PM	SiCl4 MFC set to  0.000000
5/21/2011	6:14:57 PM	Bypass solenoid MFC set to  0.000000
5/21/2011	6:14:57 PM	Tube furnace set to 0
5/21/2011	6:14:58 PM	Run finished at 6:14 PM
5/21/2011	6:14:58 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/21/2011	6:33:57 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/21/2011	6:33:58 PM	Recipe started at 6:33 PM
5/21/2011	6:33:58 PM	Helium valve closed
5/21/2011	6:33:58 PM	H2 valve closed
5/21/2011	6:33:58 PM	BCl3 valve closed
5/21/2011	6:33:58 PM	PH3 valve closed
5/21/2011	6:33:58 PM	SiCl4 pre valve closed
5/21/2011	6:33:58 PM	SiCl4 post valve closed
5/21/2011	6:33:58 PM	Main Vac valve closed
5/21/2011	6:33:58 PM	Bubbler valve closed
5/21/2011	6:33:58 PM	Bypass valve opened
5/21/2011	6:33:58 PM	Helium MFC set to  0.000000
5/21/2011	6:33:58 PM	H2 MFC set to  0.000000
5/21/2011	6:33:58 PM	BCl3 MFC set to  0.000000
5/21/2011	6:33:58 PM	PHl3 MFC set to  0.000000
5/21/2011	6:33:58 PM	SiCl4 MFC set to  0.000000
5/21/2011	6:33:58 PM	Bypass solenoid MFC set to  0.000000
5/21/2011	6:33:58 PM	Tube furnace set to 0
5/21/2011	6:34:32 PM	Helium valve closed
5/21/2011	6:34:32 PM	H2 valve closed
5/21/2011	6:34:32 PM	BCl3 valve closed
5/21/2011	6:34:32 PM	PH3 valve closed
5/21/2011	6:34:32 PM	SiCl4 pre valve closed
5/21/2011	6:34:32 PM	SiCl4 post valve closed
5/21/2011	6:34:32 PM	Bubbler valve closed
5/21/2011	6:34:32 PM	Main Vac valve opened
5/21/2011	6:34:32 PM	Bypass valve opened
5/21/2011	6:34:32 PM	Helium MFC set to  0.000000
5/21/2011	6:34:32 PM	H2 MFC set to  0.000000
5/21/2011	6:34:32 PM	BCl3 MFC set to  0.000000
5/21/2011	6:34:32 PM	PHl3 MFC set to  0.000000
5/21/2011	6:34:32 PM	SiCl4 MFC set to  0.000000
5/21/2011	6:34:32 PM	Bypass solenoid MFC set to  0.000000
5/21/2011	6:34:32 PM	Tube furnace set to 0
5/21/2011	6:34:32 PM	Run finished at 6:34 PM
5/21/2011	6:34:32 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/21/2011	7:50:59 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
5/21/2011	7:51:11 PM	Recipe started at 7:51 PM
5/21/2011	7:51:11 PM	Helium valve closed
5/21/2011	7:51:11 PM	H2 valve closed
5/21/2011	7:51:11 PM	BCl3 valve closed
5/21/2011	7:51:11 PM	PH3 valve closed
5/21/2011	7:51:11 PM	SiCl4 pre valve closed
5/21/2011	7:51:11 PM	SiCl4 post valve closed
5/21/2011	7:51:11 PM	Main Vac valve closed
5/21/2011	7:51:11 PM	Bubbler valve closed
5/21/2011	7:51:11 PM	Bypass valve opened
5/21/2011	7:51:11 PM	Helium MFC set to  0.000000
5/21/2011	7:51:11 PM	H2 MFC set to  0.000000
5/21/2011	7:51:11 PM	BCl3 MFC set to  0.000000
5/21/2011	7:51:11 PM	PHl3 MFC set to  0.000000
5/21/2011	7:51:11 PM	SiCl4 MFC set to  0.000000
5/21/2011	7:51:11 PM	Bypass solenoid MFC set to  0.000000
5/21/2011	7:51:11 PM	Tube furnace set to 0
5/21/2011	7:51:11 PM	Helium valve closed
5/21/2011	7:51:11 PM	H2 valve closed
5/21/2011	7:51:11 PM	BCl3 valve closed
5/21/2011	7:51:11 PM	PH3 valve closed
5/21/2011	7:51:11 PM	SiCl4 pre valve closed
5/21/2011	7:51:11 PM	SiCl4 post valve closed
5/21/2011	7:51:11 PM	Bubbler valve closed
5/21/2011	7:51:11 PM	Main Vac valve opened
5/21/2011	7:51:11 PM	Bypass valve opened
5/21/2011	7:51:11 PM	Helium MFC set to  0.000000
5/21/2011	7:51:11 PM	H2 MFC set to  0.000000
5/21/2011	7:51:11 PM	BCl3 MFC set to  0.000000
5/21/2011	7:51:11 PM	PHl3 MFC set to  0.000000
5/21/2011	7:51:11 PM	SiCl4 MFC set to  0.000000
5/21/2011	7:51:11 PM	Bypass solenoid MFC set to  0.000000
5/21/2011	7:51:11 PM	Tube furnace set to 0
5/21/2011	7:52:11 PM	H2 valve closed
5/21/2011	7:52:11 PM	BCl3 valve closed
5/21/2011	7:52:11 PM	PH3 valve closed
5/21/2011	7:52:11 PM	SiCl4 pre valve closed
5/21/2011	7:52:11 PM	SiCl4 post valve closed
5/21/2011	7:52:11 PM	Bubbler valve closed
5/21/2011	7:52:11 PM	Helium valve opened
5/21/2011	7:52:11 PM	Main Vac valve opened
5/21/2011	7:52:11 PM	Bypass valve opened
5/21/2011	7:52:11 PM	Helium MFC set to  100.000000
5/21/2011	7:52:11 PM	H2 MFC set to  0.000000
5/21/2011	7:52:11 PM	BCl3 MFC set to  0.000000
5/21/2011	7:52:11 PM	PHl3 MFC set to  0.000000
5/21/2011	7:52:11 PM	SiCl4 MFC set to  0.000000
5/21/2011	7:52:11 PM	Bypass solenoid MFC set to  0.000000
5/21/2011	7:52:12 PM	Tube furnace set to 0
5/21/2011	7:53:12 PM	Helium valve closed
5/21/2011	7:53:12 PM	H2 valve closed
5/21/2011	7:53:12 PM	BCl3 valve closed
5/21/2011	7:53:12 PM	PH3 valve closed
5/21/2011	7:53:12 PM	SiCl4 pre valve closed
5/21/2011	7:53:12 PM	SiCl4 post valve closed
5/21/2011	7:53:12 PM	Bubbler valve closed
5/21/2011	7:53:12 PM	Main Vac valve opened
5/21/2011	7:53:12 PM	Bypass valve opened
5/21/2011	7:53:12 PM	Helium MFC set to  0.000000
5/21/2011	7:53:12 PM	H2 MFC set to  0.000000
5/21/2011	7:53:12 PM	BCl3 MFC set to  0.000000
5/21/2011	7:53:12 PM	PHl3 MFC set to  0.000000
5/21/2011	7:53:12 PM	SiCl4 MFC set to  0.000000
5/21/2011	7:53:12 PM	Bypass solenoid MFC set to  0.000000
5/21/2011	7:53:12 PM	Tube furnace set to 0
5/21/2011	7:54:12 PM	H2 valve closed
5/21/2011	7:54:12 PM	BCl3 valve closed
5/21/2011	7:54:12 PM	PH3 valve closed
5/21/2011	7:54:12 PM	SiCl4 pre valve closed
5/21/2011	7:54:12 PM	SiCl4 post valve closed
5/21/2011	7:54:12 PM	Bubbler valve closed
5/21/2011	7:54:12 PM	Helium valve opened
5/21/2011	7:54:12 PM	Main Vac valve opened
5/21/2011	7:54:12 PM	Bypass valve opened
5/21/2011	7:54:12 PM	Helium MFC set to  100.000000
5/21/2011	7:54:12 PM	H2 MFC set to  0.000000
5/21/2011	7:54:12 PM	BCl3 MFC set to  0.000000
5/21/2011	7:54:12 PM	PHl3 MFC set to  0.000000
5/21/2011	7:54:12 PM	SiCl4 MFC set to  0.000000
5/21/2011	7:54:12 PM	Bypass solenoid MFC set to  0.000000
5/21/2011	7:54:12 PM	Tube furnace set to 0
5/21/2011	7:55:12 PM	Helium valve closed
5/21/2011	7:55:12 PM	H2 valve closed
5/21/2011	7:55:12 PM	BCl3 valve closed
5/21/2011	7:55:12 PM	PH3 valve closed
5/21/2011	7:55:12 PM	SiCl4 pre valve closed
5/21/2011	7:55:12 PM	SiCl4 post valve closed
5/21/2011	7:55:12 PM	Bubbler valve closed
5/21/2011	7:55:12 PM	Main Vac valve opened
5/21/2011	7:55:12 PM	Bypass valve opened
5/21/2011	7:55:12 PM	Helium MFC set to  0.000000
5/21/2011	7:55:12 PM	H2 MFC set to  0.000000
5/21/2011	7:55:12 PM	BCl3 MFC set to  0.000000
5/21/2011	7:55:12 PM	PHl3 MFC set to  0.000000
5/21/2011	7:55:12 PM	SiCl4 MFC set to  0.000000
5/21/2011	7:55:12 PM	Bypass solenoid MFC set to  0.000000
5/21/2011	7:55:12 PM	Tube furnace set to 0
5/21/2011	7:56:12 PM	H2 valve closed
5/21/2011	7:56:12 PM	BCl3 valve closed
5/21/2011	7:56:12 PM	PH3 valve closed
5/21/2011	7:56:12 PM	SiCl4 pre valve closed
5/21/2011	7:56:12 PM	SiCl4 post valve closed
5/21/2011	7:56:12 PM	Bubbler valve closed
5/21/2011	7:56:12 PM	Helium valve opened
5/21/2011	7:56:12 PM	Main Vac valve opened
5/21/2011	7:56:12 PM	Bypass valve opened
5/21/2011	7:56:12 PM	Helium MFC set to  100.000000
5/21/2011	7:56:12 PM	H2 MFC set to  0.000000
5/21/2011	7:56:12 PM	BCl3 MFC set to  0.000000
5/21/2011	7:56:12 PM	PHl3 MFC set to  0.000000
5/21/2011	7:56:12 PM	SiCl4 MFC set to  0.000000
5/21/2011	7:56:12 PM	Bypass solenoid MFC set to  0.000000
5/21/2011	7:56:12 PM	Tube furnace set to 0
5/21/2011	7:57:12 PM	Helium valve closed
5/21/2011	7:57:12 PM	H2 valve closed
5/21/2011	7:57:12 PM	BCl3 valve closed
5/21/2011	7:57:12 PM	PH3 valve closed
5/21/2011	7:57:12 PM	SiCl4 pre valve closed
5/21/2011	7:57:12 PM	SiCl4 post valve closed
5/21/2011	7:57:12 PM	Bubbler valve closed
5/21/2011	7:57:12 PM	Main Vac valve opened
5/21/2011	7:57:12 PM	Bypass valve opened
5/21/2011	7:57:12 PM	Helium MFC set to  0.000000
5/21/2011	7:57:12 PM	H2 MFC set to  0.000000
5/21/2011	7:57:13 PM	BCl3 MFC set to  0.000000
5/21/2011	7:57:13 PM	PHl3 MFC set to  0.000000
5/21/2011	7:57:13 PM	SiCl4 MFC set to  0.000000
5/21/2011	7:57:13 PM	Bypass solenoid MFC set to  0.000000
5/21/2011	7:57:13 PM	Tube furnace set to 0
5/21/2011	7:58:13 PM	H2 valve closed
5/21/2011	7:58:13 PM	BCl3 valve closed
5/21/2011	7:58:13 PM	PH3 valve closed
5/21/2011	7:58:13 PM	SiCl4 pre valve closed
5/21/2011	7:58:13 PM	SiCl4 post valve closed
5/21/2011	7:58:13 PM	Bubbler valve closed
5/21/2011	7:58:13 PM	Helium valve opened
5/21/2011	7:58:13 PM	Main Vac valve opened
5/21/2011	7:58:13 PM	Bypass valve opened
5/21/2011	7:58:13 PM	Helium MFC set to  100.000000
5/21/2011	7:58:13 PM	H2 MFC set to  0.000000
5/21/2011	7:58:13 PM	BCl3 MFC set to  0.000000
5/21/2011	7:58:13 PM	PHl3 MFC set to  0.000000
5/21/2011	7:58:13 PM	SiCl4 MFC set to  0.000000
5/21/2011	7:58:13 PM	Bypass solenoid MFC set to  0.000000
5/21/2011	7:58:13 PM	Tube furnace set to 0
5/21/2011	7:59:13 PM	Helium valve closed
5/21/2011	7:59:13 PM	H2 valve closed
5/21/2011	7:59:13 PM	BCl3 valve closed
5/21/2011	7:59:13 PM	PH3 valve closed
5/21/2011	7:59:13 PM	SiCl4 pre valve closed
5/21/2011	7:59:13 PM	SiCl4 post valve closed
5/21/2011	7:59:13 PM	Bubbler valve closed
5/21/2011	7:59:13 PM	Main Vac valve opened
5/21/2011	7:59:13 PM	Bypass valve opened
5/21/2011	7:59:13 PM	Helium MFC set to  0.000000
5/21/2011	7:59:13 PM	H2 MFC set to  0.000000
5/21/2011	7:59:13 PM	BCl3 MFC set to  0.000000
5/21/2011	7:59:13 PM	PHl3 MFC set to  0.000000
5/21/2011	7:59:13 PM	SiCl4 MFC set to  0.000000
5/21/2011	7:59:13 PM	Bypass solenoid MFC set to  0.000000
5/21/2011	7:59:13 PM	Tube furnace set to 0
5/21/2011	8:00:13 PM	H2 valve closed
5/21/2011	8:00:13 PM	BCl3 valve closed
5/21/2011	8:00:13 PM	PH3 valve closed
5/21/2011	8:00:13 PM	SiCl4 pre valve closed
5/21/2011	8:00:13 PM	SiCl4 post valve closed
5/21/2011	8:00:13 PM	Bubbler valve closed
5/21/2011	8:00:13 PM	Helium valve opened
5/21/2011	8:00:13 PM	Main Vac valve opened
5/21/2011	8:00:13 PM	Bypass valve opened
5/21/2011	8:00:13 PM	Helium MFC set to  100.000000
5/21/2011	8:00:13 PM	H2 MFC set to  0.000000
5/21/2011	8:00:13 PM	BCl3 MFC set to  0.000000
5/21/2011	8:00:13 PM	PHl3 MFC set to  0.000000
5/21/2011	8:00:13 PM	SiCl4 MFC set to  0.000000
5/21/2011	8:00:13 PM	Bypass solenoid MFC set to  0.000000
5/21/2011	8:00:13 PM	Tube furnace set to 0
5/21/2011	8:01:13 PM	Helium valve closed
5/21/2011	8:01:13 PM	H2 valve closed
5/21/2011	8:01:13 PM	BCl3 valve closed
5/21/2011	8:01:13 PM	PH3 valve closed
5/21/2011	8:01:13 PM	SiCl4 pre valve closed
5/21/2011	8:01:13 PM	SiCl4 post valve closed
5/21/2011	8:01:13 PM	Bubbler valve closed
5/21/2011	8:01:13 PM	Main Vac valve opened
5/21/2011	8:01:13 PM	Bypass valve opened
5/21/2011	8:01:13 PM	Helium MFC set to  0.000000
5/21/2011	8:01:13 PM	H2 MFC set to  0.000000
5/21/2011	8:01:13 PM	BCl3 MFC set to  0.000000
5/21/2011	8:01:13 PM	PHl3 MFC set to  0.000000
5/21/2011	8:01:13 PM	SiCl4 MFC set to  0.000000
5/21/2011	8:01:13 PM	Bypass solenoid MFC set to  0.000000
5/21/2011	8:01:13 PM	Tube furnace set to 0
5/21/2011	8:02:13 PM	H2 valve closed
5/21/2011	8:02:13 PM	BCl3 valve closed
5/21/2011	8:02:13 PM	PH3 valve closed
5/21/2011	8:02:13 PM	SiCl4 pre valve closed
5/21/2011	8:02:13 PM	SiCl4 post valve closed
5/21/2011	8:02:13 PM	Bubbler valve closed
5/21/2011	8:02:14 PM	Helium valve opened
5/21/2011	8:02:14 PM	Main Vac valve opened
5/21/2011	8:02:14 PM	Bypass valve opened
5/21/2011	8:02:14 PM	Helium MFC set to  100.000000
5/21/2011	8:02:14 PM	H2 MFC set to  0.000000
5/21/2011	8:02:14 PM	BCl3 MFC set to  0.000000
5/21/2011	8:02:14 PM	PHl3 MFC set to  0.000000
5/21/2011	8:02:14 PM	SiCl4 MFC set to  0.000000
5/21/2011	8:02:14 PM	Bypass solenoid MFC set to  0.000000
5/21/2011	8:02:14 PM	Tube furnace set to 0
5/21/2011	8:03:14 PM	Helium valve closed
5/21/2011	8:03:14 PM	H2 valve closed
5/21/2011	8:03:14 PM	BCl3 valve closed
5/21/2011	8:03:14 PM	PH3 valve closed
5/21/2011	8:03:14 PM	SiCl4 pre valve closed
5/21/2011	8:03:14 PM	SiCl4 post valve closed
5/21/2011	8:03:14 PM	Bubbler valve closed
5/21/2011	8:03:14 PM	Main Vac valve opened
5/21/2011	8:03:14 PM	Bypass valve opened
5/21/2011	8:03:14 PM	Helium MFC set to  0.000000
5/21/2011	8:03:14 PM	H2 MFC set to  0.000000
5/21/2011	8:03:14 PM	BCl3 MFC set to  0.000000
5/21/2011	8:03:14 PM	PHl3 MFC set to  0.000000
5/21/2011	8:03:14 PM	SiCl4 MFC set to  0.000000
5/21/2011	8:03:14 PM	Bypass solenoid MFC set to  0.000000
5/21/2011	8:03:14 PM	Tube furnace set to 0
5/21/2011	8:04:14 PM	H2 valve closed
5/21/2011	8:04:14 PM	BCl3 valve closed
5/21/2011	8:04:14 PM	PH3 valve closed
5/21/2011	8:04:14 PM	SiCl4 pre valve closed
5/21/2011	8:04:14 PM	SiCl4 post valve closed
5/21/2011	8:04:14 PM	Bubbler valve closed
5/21/2011	8:04:14 PM	Helium valve opened
5/21/2011	8:04:14 PM	Main Vac valve opened
5/21/2011	8:04:14 PM	Bypass valve opened
5/21/2011	8:04:14 PM	Helium MFC set to  100.000000
5/21/2011	8:04:14 PM	H2 MFC set to  0.000000
5/21/2011	8:04:14 PM	BCl3 MFC set to  0.000000
5/21/2011	8:04:14 PM	PHl3 MFC set to  0.000000
5/21/2011	8:04:14 PM	SiCl4 MFC set to  0.000000
5/21/2011	8:04:14 PM	Bypass solenoid MFC set to  0.000000
5/21/2011	8:04:14 PM	Tube furnace set to 0
5/21/2011	8:05:14 PM	Helium valve closed
5/21/2011	8:05:14 PM	H2 valve closed
5/21/2011	8:05:14 PM	BCl3 valve closed
5/21/2011	8:05:14 PM	PH3 valve closed
5/21/2011	8:05:14 PM	SiCl4 pre valve closed
5/21/2011	8:05:14 PM	SiCl4 post valve closed
5/21/2011	8:05:14 PM	Bubbler valve closed
5/21/2011	8:05:14 PM	Main Vac valve opened
5/21/2011	8:05:14 PM	Bypass valve opened
5/21/2011	8:05:14 PM	Helium MFC set to  0.000000
5/21/2011	8:05:14 PM	H2 MFC set to  0.000000
5/21/2011	8:05:14 PM	BCl3 MFC set to  0.000000
5/21/2011	8:05:14 PM	PHl3 MFC set to  0.000000
5/21/2011	8:05:14 PM	SiCl4 MFC set to  0.000000
5/21/2011	8:05:14 PM	Bypass solenoid MFC set to  0.000000
5/21/2011	8:05:14 PM	Tube furnace set to 0
5/21/2011	8:06:14 PM	H2 valve closed
5/21/2011	8:06:14 PM	BCl3 valve closed
5/21/2011	8:06:14 PM	PH3 valve closed
5/21/2011	8:06:14 PM	SiCl4 pre valve closed
5/21/2011	8:06:14 PM	SiCl4 post valve closed
5/21/2011	8:06:14 PM	Bubbler valve closed
5/21/2011	8:06:14 PM	Helium valve opened
5/21/2011	8:06:14 PM	Main Vac valve opened
5/21/2011	8:06:14 PM	Bypass valve opened
5/21/2011	8:06:14 PM	Helium MFC set to  100.000000
5/21/2011	8:06:14 PM	H2 MFC set to  0.000000
5/21/2011	8:06:14 PM	BCl3 MFC set to  0.000000
5/21/2011	8:06:14 PM	PHl3 MFC set to  0.000000
5/21/2011	8:06:14 PM	SiCl4 MFC set to  0.000000
5/21/2011	8:06:14 PM	Bypass solenoid MFC set to  0.000000
5/21/2011	8:06:14 PM	Tube furnace set to 0
5/21/2011	8:07:15 PM	Helium valve closed
5/21/2011	8:07:15 PM	H2 valve closed
5/21/2011	8:07:15 PM	BCl3 valve closed
5/21/2011	8:07:15 PM	PH3 valve closed
5/21/2011	8:07:15 PM	SiCl4 pre valve closed
5/21/2011	8:07:15 PM	SiCl4 post valve closed
5/21/2011	8:07:15 PM	Bubbler valve closed
5/21/2011	8:07:15 PM	Main Vac valve opened
5/21/2011	8:07:15 PM	Bypass valve opened
5/21/2011	8:07:15 PM	Helium MFC set to  0.000000
5/21/2011	8:07:15 PM	H2 MFC set to  0.000000
5/21/2011	8:07:15 PM	BCl3 MFC set to  0.000000
5/21/2011	8:07:15 PM	PHl3 MFC set to  0.000000
5/21/2011	8:07:15 PM	SiCl4 MFC set to  0.000000
5/21/2011	8:07:15 PM	Bypass solenoid MFC set to  0.000000
5/21/2011	8:07:15 PM	Tube furnace set to 0
5/21/2011	8:08:15 PM	H2 valve closed
5/21/2011	8:08:15 PM	BCl3 valve closed
5/21/2011	8:08:15 PM	PH3 valve closed
5/21/2011	8:08:15 PM	SiCl4 pre valve closed
5/21/2011	8:08:15 PM	SiCl4 post valve closed
5/21/2011	8:08:15 PM	Bubbler valve closed
5/21/2011	8:08:15 PM	Helium valve opened
5/21/2011	8:08:15 PM	Main Vac valve opened
5/21/2011	8:08:15 PM	Bypass valve opened
5/21/2011	8:08:15 PM	Helium MFC set to  100.000000
5/21/2011	8:08:15 PM	H2 MFC set to  0.000000
5/21/2011	8:08:15 PM	BCl3 MFC set to  0.000000
5/21/2011	8:08:15 PM	PHl3 MFC set to  0.000000
5/21/2011	8:08:15 PM	SiCl4 MFC set to  0.000000
5/21/2011	8:08:15 PM	Bypass solenoid MFC set to  0.000000
5/21/2011	8:08:15 PM	Tube furnace set to 0
5/21/2011	8:09:15 PM	Helium valve closed
5/21/2011	8:09:15 PM	H2 valve closed
5/21/2011	8:09:15 PM	BCl3 valve closed
5/21/2011	8:09:15 PM	PH3 valve closed
5/21/2011	8:09:15 PM	SiCl4 pre valve closed
5/21/2011	8:09:15 PM	SiCl4 post valve closed
5/21/2011	8:09:15 PM	Bubbler valve closed
5/21/2011	8:09:15 PM	Main Vac valve opened
5/21/2011	8:09:15 PM	Bypass valve opened
5/21/2011	8:09:15 PM	Helium MFC set to  0.000000
5/21/2011	8:09:15 PM	H2 MFC set to  0.000000
5/21/2011	8:09:15 PM	BCl3 MFC set to  0.000000
5/21/2011	8:09:15 PM	PHl3 MFC set to  0.000000
5/21/2011	8:09:15 PM	SiCl4 MFC set to  0.000000
5/21/2011	8:09:15 PM	Bypass solenoid MFC set to  0.000000
5/21/2011	8:09:15 PM	Tube furnace set to 0
5/21/2011	8:10:15 PM	H2 valve closed
5/21/2011	8:10:15 PM	BCl3 valve closed
5/21/2011	8:10:15 PM	PH3 valve closed
5/21/2011	8:10:15 PM	SiCl4 pre valve closed
5/21/2011	8:10:15 PM	SiCl4 post valve closed
5/21/2011	8:10:15 PM	Bubbler valve closed
5/21/2011	8:10:15 PM	Helium valve opened
5/21/2011	8:10:15 PM	Main Vac valve opened
5/21/2011	8:10:15 PM	Bypass valve opened
5/21/2011	8:10:15 PM	Helium MFC set to  100.000000
5/21/2011	8:10:15 PM	H2 MFC set to  0.000000
5/21/2011	8:10:15 PM	BCl3 MFC set to  0.000000
5/21/2011	8:10:15 PM	PHl3 MFC set to  0.000000
5/21/2011	8:10:15 PM	SiCl4 MFC set to  0.000000
5/21/2011	8:10:15 PM	Bypass solenoid MFC set to  0.000000
5/21/2011	8:10:15 PM	Tube furnace set to 0
5/21/2011	8:11:15 PM	Helium valve closed
5/21/2011	8:11:15 PM	H2 valve closed
5/21/2011	8:11:15 PM	BCl3 valve closed
5/21/2011	8:11:15 PM	PH3 valve closed
5/21/2011	8:11:15 PM	SiCl4 pre valve closed
5/21/2011	8:11:15 PM	SiCl4 post valve closed
5/21/2011	8:11:15 PM	Bubbler valve closed
5/21/2011	8:11:15 PM	Main Vac valve opened
5/21/2011	8:11:15 PM	Bypass valve opened
5/21/2011	8:11:15 PM	Helium MFC set to  0.000000
5/21/2011	8:11:15 PM	H2 MFC set to  0.000000
5/21/2011	8:11:15 PM	BCl3 MFC set to  0.000000
5/21/2011	8:11:15 PM	PHl3 MFC set to  0.000000
5/21/2011	8:11:15 PM	SiCl4 MFC set to  0.000000
5/21/2011	8:11:15 PM	Bypass solenoid MFC set to  0.000000
5/21/2011	8:11:16 PM	Tube furnace set to 0
5/21/2011	8:11:17 PM	Run finished at 8:11 PM
5/21/2011	8:11:17 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
5/21/2011	8:12:05 PM	Recipe started at 8:12 PM
5/21/2011	8:12:05 PM	Helium valve closed
5/21/2011	8:12:05 PM	BCl3 valve closed
5/21/2011	8:12:05 PM	PH3 valve closed
5/21/2011	8:12:05 PM	SiCl4 pre valve closed
5/21/2011	8:12:05 PM	SiCl4 post valve closed
5/21/2011	8:12:05 PM	Main Vac valve closed
5/21/2011	8:12:05 PM	Bypass valve closed
5/21/2011	8:12:05 PM	Bubbler valve closed
5/21/2011	8:12:05 PM	H2 valve opened
5/21/2011	8:12:05 PM	Helium MFC set to  0.000000
5/21/2011	8:12:05 PM	H2 MFC set to  500.000000
5/21/2011	8:12:05 PM	BCl3 MFC set to  0.000000
5/21/2011	8:12:05 PM	PHl3 MFC set to  0.000000
5/21/2011	8:12:05 PM	SiCl4 MFC set to  0.000000
5/21/2011	8:12:05 PM	Bypass solenoid MFC set to  0.000000
5/21/2011	8:12:05 PM	Tube furnace set to 0
5/21/2011	8:13:26 PM	Helium valve closed
5/21/2011	8:13:26 PM	BCl3 valve closed
5/21/2011	8:13:26 PM	PH3 valve closed
5/21/2011	8:13:26 PM	SiCl4 pre valve closed
5/21/2011	8:13:26 PM	SiCl4 post valve closed
5/21/2011	8:13:26 PM	Main Vac valve closed
5/21/2011	8:13:26 PM	Bypass valve closed
5/21/2011	8:13:26 PM	H2 valve opened
5/21/2011	8:13:26 PM	Bubbler valve opened
5/21/2011	8:13:26 PM	Helium MFC set to  0.000000
5/21/2011	8:13:26 PM	H2 MFC set to  500.000000
5/21/2011	8:13:26 PM	BCl3 MFC set to  0.000000
5/21/2011	8:13:26 PM	PHl3 MFC set to  0.000000
5/21/2011	8:13:26 PM	SiCl4 MFC set to  0.000000
5/21/2011	8:13:26 PM	Bypass solenoid MFC set to  0.000000
5/21/2011	8:13:26 PM	Tube furnace set to 250
5/21/2011	8:33:26 PM	Helium valve closed
5/21/2011	8:33:26 PM	BCl3 valve closed
5/21/2011	8:33:26 PM	PH3 valve closed
5/21/2011	8:33:26 PM	SiCl4 pre valve closed
5/21/2011	8:33:26 PM	SiCl4 post valve closed
5/21/2011	8:33:26 PM	Main Vac valve closed
5/21/2011	8:33:26 PM	Bypass valve closed
5/21/2011	8:33:26 PM	H2 valve opened
5/21/2011	8:33:26 PM	Bubbler valve opened
5/21/2011	8:33:26 PM	Helium MFC set to  0.000000
5/21/2011	8:33:26 PM	H2 MFC set to  500.000000
5/21/2011	8:33:26 PM	BCl3 MFC set to  0.000000
5/21/2011	8:33:26 PM	PHl3 MFC set to  0.000000
5/21/2011	8:33:26 PM	SiCl4 MFC set to  0.000000
5/21/2011	8:33:26 PM	Bypass solenoid MFC set to  0.000000
5/21/2011	8:33:27 PM	Tube furnace set to 1000
5/21/2011	8:53:27 PM	Helium valve closed
5/21/2011	8:53:27 PM	BCl3 valve closed
5/21/2011	8:53:27 PM	Main Vac valve closed
5/21/2011	8:53:27 PM	Bypass valve closed
5/21/2011	8:53:27 PM	H2 valve opened
5/21/2011	8:53:27 PM	PH3 valve opened
5/21/2011	8:53:27 PM	SiCl4 pre valve opened
5/21/2011	8:53:27 PM	SiCl4 post valve opened
5/21/2011	8:53:27 PM	Bubbler valve opened
5/21/2011	8:53:27 PM	Helium MFC set to  0.000000
5/21/2011	8:53:27 PM	H2 MFC set to  500.000000
5/21/2011	8:53:27 PM	BCl3 MFC set to  0.000000
5/21/2011	8:53:27 PM	PHl3 MFC set to  1.000000
5/21/2011	8:53:27 PM	SiCl4 MFC set to  75.000000
5/21/2011	8:53:27 PM	Bypass solenoid MFC set to  0.000000
5/21/2011	8:53:27 PM	Tube furnace set to 1000
5/21/2011	9:09:27 PM	H2 valve closed
5/21/2011	9:09:27 PM	BCl3 valve closed
5/21/2011	9:09:27 PM	PH3 valve closed
5/21/2011	9:09:27 PM	SiCl4 pre valve closed
5/21/2011	9:09:27 PM	SiCl4 post valve closed
5/21/2011	9:09:27 PM	Main Vac valve closed
5/21/2011	9:09:27 PM	Bypass valve closed
5/21/2011	9:09:27 PM	Helium valve opened
5/21/2011	9:09:27 PM	Bubbler valve opened
5/21/2011	9:09:27 PM	Helium MFC set to  500.000000
5/21/2011	9:09:27 PM	H2 MFC set to  0.000000
5/21/2011	9:09:27 PM	BCl3 MFC set to  0.000000
5/21/2011	9:09:27 PM	PHl3 MFC set to  0.000000
5/21/2011	9:09:27 PM	SiCl4 MFC set to  0.000000
5/21/2011	9:09:27 PM	Bypass solenoid MFC set to  0.000000
5/21/2011	9:09:27 PM	Tube furnace set to 0
5/21/2011	9:29:27 PM	Helium valve closed
5/21/2011	9:29:27 PM	H2 valve closed
5/21/2011	9:29:27 PM	BCl3 valve closed
5/21/2011	9:29:27 PM	PH3 valve closed
5/21/2011	9:29:27 PM	SiCl4 pre valve closed
5/21/2011	9:29:27 PM	SiCl4 post valve closed
5/21/2011	9:29:27 PM	Main Vac valve closed
5/21/2011	9:29:27 PM	Bypass valve closed
5/21/2011	9:29:27 PM	Bubbler valve closed
5/21/2011	9:29:27 PM	Helium MFC set to  0.000000
5/21/2011	9:29:27 PM	H2 MFC set to  0.000000
5/21/2011	9:29:27 PM	BCl3 MFC set to  0.000000
5/21/2011	9:29:27 PM	PHl3 MFC set to  0.000000
5/21/2011	9:29:27 PM	SiCl4 MFC set to  0.000000
5/21/2011	9:29:27 PM	Bypass solenoid MFC set to  0.000000
5/21/2011	9:29:27 PM	Tube furnace set to 0
5/21/2011	9:29:27 PM	Run finished at 9:29 PM
5/21/2011	11:18:34 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/21/2011	11:18:35 PM	Recipe started at 11:18 PM
5/21/2011	11:18:35 PM	H2 valve closed
5/21/2011	11:18:35 PM	BCl3 valve closed
5/21/2011	11:18:35 PM	PH3 valve closed
5/21/2011	11:18:35 PM	SiCl4 pre valve closed
5/21/2011	11:18:35 PM	SiCl4 post valve closed
5/21/2011	11:18:35 PM	Main Vac valve closed
5/21/2011	11:18:35 PM	Bypass valve closed
5/21/2011	11:18:35 PM	Bubbler valve closed
5/21/2011	11:18:35 PM	Helium valve opened
5/21/2011	11:18:35 PM	Helium MFC set to  500.000000
5/21/2011	11:18:35 PM	H2 MFC set to  0.000000
5/21/2011	11:18:35 PM	BCl3 MFC set to  0.000000
5/21/2011	11:18:35 PM	PHl3 MFC set to  0.000000
5/21/2011	11:18:35 PM	SiCl4 MFC set to  0.000000
5/21/2011	11:18:35 PM	Bypass solenoid MFC set to  0.000000
5/21/2011	11:18:35 PM	Tube furnace set to 0
5/21/2011	11:18:42 PM	Helium valve closed
5/21/2011	11:18:42 PM	H2 valve closed
5/21/2011	11:18:42 PM	BCl3 valve closed
5/21/2011	11:18:42 PM	PH3 valve closed
5/21/2011	11:18:42 PM	SiCl4 pre valve closed
5/21/2011	11:18:42 PM	SiCl4 post valve closed
5/21/2011	11:18:42 PM	Main Vac valve closed
5/21/2011	11:18:42 PM	Bypass valve closed
5/21/2011	11:18:42 PM	Bubbler valve closed
5/21/2011	11:18:42 PM	Helium MFC set to  0.000000
5/21/2011	11:18:42 PM	H2 MFC set to  0.000000
5/21/2011	11:18:42 PM	BCl3 MFC set to  0.000000
5/21/2011	11:18:42 PM	PHl3 MFC set to  0.000000
5/21/2011	11:18:42 PM	SiCl4 MFC set to  0.000000
5/21/2011	11:18:42 PM	Bypass solenoid MFC set to  0.000000
5/21/2011	11:18:42 PM	Tube furnace set to 0
5/21/2011	11:18:42 PM	Run finished at 11:18 PM
5/21/2011	11:18:42 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/21/2011	11:23:41 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/21/2011	11:23:41 PM	Recipe started at 11:23 PM
5/21/2011	11:23:41 PM	Helium valve closed
5/21/2011	11:23:41 PM	H2 valve closed
5/21/2011	11:23:41 PM	BCl3 valve closed
5/21/2011	11:23:41 PM	PH3 valve closed
5/21/2011	11:23:41 PM	SiCl4 pre valve closed
5/21/2011	11:23:41 PM	SiCl4 post valve closed
5/21/2011	11:23:41 PM	Main Vac valve closed
5/21/2011	11:23:41 PM	Bubbler valve closed
5/21/2011	11:23:41 PM	Bypass valve opened
5/21/2011	11:23:41 PM	Helium MFC set to  0.000000
5/21/2011	11:23:41 PM	H2 MFC set to  0.000000
5/21/2011	11:23:41 PM	BCl3 MFC set to  0.000000
5/21/2011	11:23:41 PM	PHl3 MFC set to  0.000000
5/21/2011	11:23:41 PM	SiCl4 MFC set to  0.000000
5/21/2011	11:23:41 PM	Bypass solenoid MFC set to  0.000000
5/21/2011	11:23:42 PM	Tube furnace set to 0
5/21/2011	11:24:13 PM	Helium valve closed
5/21/2011	11:24:13 PM	H2 valve closed
5/21/2011	11:24:13 PM	BCl3 valve closed
5/21/2011	11:24:13 PM	PH3 valve closed
5/21/2011	11:24:13 PM	SiCl4 pre valve closed
5/21/2011	11:24:13 PM	SiCl4 post valve closed
5/21/2011	11:24:13 PM	Bubbler valve closed
5/21/2011	11:24:13 PM	Main Vac valve opened
5/21/2011	11:24:13 PM	Bypass valve opened
5/21/2011	11:24:13 PM	Helium MFC set to  0.000000
5/21/2011	11:24:13 PM	H2 MFC set to  0.000000
5/21/2011	11:24:13 PM	BCl3 MFC set to  0.000000
5/21/2011	11:24:13 PM	PHl3 MFC set to  0.000000
5/21/2011	11:24:13 PM	SiCl4 MFC set to  0.000000
5/21/2011	11:24:13 PM	Bypass solenoid MFC set to  0.000000
5/21/2011	11:24:14 PM	Tube furnace set to 0
5/21/2011	11:24:14 PM	Run finished at 11:24 PM
5/21/2011	11:24:14 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
